List of ALD conferences

File initiated 30.11.2015. Information updated on regular basis; do check the original conference websites for up-to-date information.  

All conferences and workshops can be listed, where ALD has been the main topic (>50% emphasis). Newest first. To request to add a conference to the list, please leave the details in the Comment field below, or send the info to Riikka Puurunen by email, at "firstname.lastname@vtt.fi"


Upcoming ALD conferences and workshops

2018

  • ALD 2018, 18th International Conference on Atomic Layer Deposition , Korea. Chair: Jin-Seong Park; co-chair, dates and location to be announced.   

 

2017


Past ALD conferences and workshops

--- The old conferences are currently not updated here: the list has moved to a Google docs spreadsheet for easier editing: https://docs.google.com/spreadsheets/d/1GG09utLpOCuq97DUPNeO4YqKb_ID0gzNtJs7IJv5-wc/edit

2017


2016

2015

  • (2015 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • 1er Workshop Reseau des Acteurs Francais de'l ALD, RAFALD, November 16-18, Minatec et Campus Est Grenoble, France. https://sites.google.com/site/rafaldepot/rafald-2015
  • Symposium of the ALD-Lab: Workshop on Atomic Layer Processing, Dresden, Germany,October 6, 2015 (at SEMICON Europa 2015). LinkChairs: Johan W. Bartha, Jonas Sundqvist.
  • Annual meeting of the COST project HERALD (http://www.cost.eu/COST_Actions/mpns/Actions/MP1402), Tartu, Estonia, September 30, 2015. http://www.bald2015.ee/herald-day/. Leader: Simon Elliott.
  • Baltic ALD 2015, 13th International Baltic Conference on Atomic Layer Deposition, Tartu, Estonia, September 28-29, 2015. http://www.bald2015.ee/. Chairs: Jaan Aarik and Kaupo Kukli.
  • ALD Russia 2015, International workshop Atomic Layer Deposition Russia 2015, Moscow-Dolgoprudny, Russia, September 21-23, 2015. http://ald-conf.ru/. Chair: Anatoly Malygin. Local organizers: Andrey Markeev, Andrey Zenkevich. Records: travel report by Puurunen
  • Workshop - ALD for Batteries, Ghent, Belgium, September 15-16, 2015. http://www.cocoon.ugent.be/workshop-batteries. <Organizer? > 
  • ALD 2015, 15th International Conference on Atomic Layer Deposition, Portland, Oregon, USA, July 1-2, 2015.  http://www2.avs.org/conferences/ALD/2015/index.html. Chairs: Charles Winter, Dae-Gyu Park.
  • Nanomanufacturing: ALD FUNdamentals, Eindhoven, The Netherlands, June 8-9, 2015. http://www.nanomanufacturing.nl/. Workshop leader: Erwin Kessels.
  • 3rd Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE), Helsinki, Finland, March 19, 2015. http://kemianseurat.fi/kemia/kp2015/. Chair: Markku Leskelä.


2014

  • The 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai, China, October 16-17, 2014. http://www.c-ald.org/ald/index.html. Chairs: Shi-Jin Ding, Yongfeng Mei.
  • Symposium of the ALD Lab Dresden 2014, October 7, 2014 at SEMICON Europa 2014 in Grenoble, France. Link. Chairs: Johan W. Bartha, Jonas Sundqvist.
  • (2014 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2014, 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, 15-18 June, 2014. http://www.ald2014.org/. Chairs: Yukihiro Shimogaki and Christian Dussarrat. Records: Abstract book, CD/DVD proceedings. 
  • Baltic ALD 2014, 12th International Baltic Conference on Atomic Layer Deposition, Helsinki, Finland, May 12-13, 2014.  Annual seminar of Finnish CoE in ALD. http://www.aldcoe.fi/bald2014/. Chair: Markku Leskelä.


2013

  • Atomic Layer Deposition Symposium of the ALD Lab Dresden, Dresden, Germany, October 8, 2013 (at SEMICON Europa 2013). LinkChairs: Johan W. Bartha, Jonas Sundqvist.
  • (2013 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2013, 13th International Conference on Atomic Layer Deposition, San Diego, California, USA, July 28-31, 2013. http://www2.avs.org/conferences/ALD/2013/index.html. Chairs:  Jiyoung Kim, Paul Ma. Records: Abstract book, CD/DVD proceedings.
  • Finnish Symposium on ALD by the ALDCoE (with Kemianpäivät), Helsinki, Finland, May 21, 2013. Chair: Markku Leskelä.


2012

  • 1st International Conference on ALD Applications and 2nd China ALD Conference, Shanghai, China, October 15-16, 2012. Chairs: David Wei Zhang, Wei-Min Li. Report: Picosun press release
  • (2012 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • Symposium of the ALD Lab Dresden 2012, October 9, 2012 at SEMICON Europa 2012 in Dresden. LinkChairs: Johan W. Bartha, Jonas Sundqvist. 
  • Joint AVS-ALD & BALD 2012, 12th International Conference on Atomic Layer Deposition, Dresden, Germany, June 17-20, 2012. http://ald2012.namlab.com/. Chairs: Uwe Schröder, Mato Knez. Records: Abstract book, CD/DVD proceedings.


2011

  • (2011 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2011, 11th International Conference on Atomic Layer Deposition, Cambridge, Massachuchetts, USA, June 26-29, 2011. http://www2.avs.org/conferences/ald/2011/index.html. Chairs: Jill Becker, Gary Rubloff. Records: Abstract book, CD/DVD proceedings. 


2010

  • 1st ALD Scientific Meeting 2010 China. Chair: Wei Zhang. Report: Picosun press release.
  • (2010 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • (ALD 2010) Seoul, Korea. Chairs: Cheol Seong Hwang, Cha Young Yoo. Records: Abstract book, CD/DVD proceedings. 
  • (Joint Baltic ALD / GerALD Conference 2010), Hamburg, Germany. <more info needed>


2009

  • (Baltic ALD 2009) Uppsala, Sweden. 
  • (2009 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2009, 9th International Conference on Atomic Layer Deposition, Monterey, California, USA, July 19-22, 2009. Chairs: Jeffrey Elam, Ana Londergan. Records: Abstract book, CD/DVD proceedings. 

2008

  • (2008 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2008, 8th International Conference on Atomic Layer Deposition, Bruges, Belgium, June 29 - July 2, 2008. http://www.phys.tue.nl/ALD2008/. Chairs: Erwin Kessels, Annelies Delabie. Records: Abstract book, CD/DVD proceedings. 

2007

  • (Joint E-MRS + Baltic ALD) Warsaw, Poland, 2007. 
  • (2007 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • ALD 2007, 7th International Conference on Atomic Layer Deposition, San Diego, California, USA, June 24-27, 2007. Chairs: Yves Chabal, Glen Wilk. Records: Abstract book, CD/DVD proceedings. 

2006

  • (Baltic ALD 2006) Oslo, Norway. 
  • (2006 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
  • (ALD 2006) Seoul, Korea. Chair: Hyungjun Kim, Shi-Woo Rhee. Records: Abstract book, CD/DVD proceedings. 

2005

  • ECS 208th Meeting - Los Angeles, California, USA, October 16-21, 2005. Symposium under "Dielectric Science and Technology/Electronics": Atomic Layer Deposition Applications: Challenges and Opportunities. http://www.electrochem.org/meetings/biannual/208/symposium_topics.htm Organizers: A.R. Londergan et al. 
  • ALD 2005, AVS 5th International Conference on Atomic Layer Deposition, San Jose, California, USA, August 8-10, 2005. Chair: Roy Gordon. Records: Abstract book, CD/DVD proceedings. 

2004

  • ALD 2004, A joint American Vacuum Society ALD and Baltic ALD conference Celebrating 30 years of ALD, Helsinki, Finland, August 16-18, 2014. http://www.helsinki.fi/ALD2004/. Chair: Mikko Ritala.  Records: Abstract book, CD/DVD proceedings. 

2003

  • ALD '03, Atomic Layer Deposition 2003, San Jose, California, USA, August 4-6, 2013. Chair: Gregory Parsons. Records: Abstract book, CD/DVD proceedings. 

2002

  • (BALD-5,) Tartu, Estonia, ____, 2002. ___ 
  • (ALD 2002) Seoul, Korea. Chair: Hyeongtag Jeon. Records: Abstract book, CD/DVD proceedings. 

2001

  • (ALD 2001) Monterey, California, USA. Chair: Steven George. Records: Abstract book, CD/DVD proceedings. 


1990s

  • ( 1999 ALENET, Helsinki ___)
  • BaltALE-4, The Fourth Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997. Chair: Arnold Rosental, co-chair: Lauri Niinistö. Records: Book of abstracts (ISBN 9985-60-401-6, (c) Institute of Physics, Tartu). 
  • (1996, ALE-4, Linz, Austria) Chair: Helmut Sitter. Records: Proceedings of the 4th International Symposium on Atomic Layer Epitaxy, Linz, Austria, 1996 (Ed. H. Sitter and H. Heinrich), Appl. Surf. Sci. 112 (1997).
  • (1995) Baltic ALE symposium, Helsinki, Finland. <dates, chair?, records>
  • (1994, ALE-4, Sendai, Japan) Chair: Jun-ichi Nishizawa. Records: Proceedings of the 3rd International Symposium on Atomic Layer Epitaxy, Sendai, Japan, 1994 (Eds. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa), Appl. Surf. Sci. 82/83 (1994).
  • TKK - TÜ 2. ALE Sümpoosium, 2. ALE Symposiumi, 2nd ALE Symposium, Tartu, Estonia, October 7-8, 1993. Records: Programme and abstracts (programm ja teesid), ISBN 9985-56-008-6, Edited by: J. Aarik and A. Jaek.
  • (1992, ALE-2, Raleigh, NC) Chair: Salah Bedair. Records: Proceedings of the 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, North Carolina, 1992, (Ed. S. M. Bedair), Thin Solid Films 225 (1993).
  • (1991, Baltic ALD) Helsinki University of Technology - Tartu University ALE Symposium, Sjökulla/Espoo, Finland. <incomplete info>
  • ALE-1, 1st International Symposium on Atomic Layer Epitaxy, Espoo, Finland, Jun 11-13, 1990. Chair: Lauri Niinistö. Records: Proceedings of the 1st International Symposium on Atomic Layer Epitaxy (Ed. L. Niinistö), Acta Polytechnica Scandinavica, Chemical Technology and Metallurgy Series No. 195 (1990), 209 pages.


1980s
  • VTT Symposium 54, First symposium on Atomic Layer Epitaxy, Espoo, Finland, December 13-14, 1984. Record: Proceedings, Ed. Riitta Paananen (copy can be obtained from VTT).  
1970s

1960s

4 comments:

  1. This comment has been removed by the author.

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  2. I'm going to travel in 2017 baltic and I'll be in Sweden in June. I'd like to visit this event ALD 2017. Where I can get more information?

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  3. I'm going to travel in 2017 baltic and I'll be in Sweden in June. I'd like to visit this event ALD 2017. Where I can get more information?

    ReplyDelete
  4. Hi aura, I think that there is no further info available yet. There will be a website by AVS coming at some point. I try to keep the info here up to date when I hear more.

    ReplyDelete